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[IEEE International Conference on Microelectronic Test Structures - Trento, Italy (25-28 March 1996)] Proceedings of International Conference on Microelectronic Test Structures - Measurement of interface states in the LDD region of a MOS transistor using a modified charge pumping technique
Prabhakar, V., Broiek, T., Chan, Y.D., Viswanathan, C.R.Year:
1996
Language:
english
DOI:
10.1109/icmts.1996.535626
File:
PDF, 339 KB
english, 1996