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[IEEE 9th International Vacuum Microelectronics Conference - St. Petersburg, Russia (7-12 July 1996)] 9th International Vacuum Microelectronics Conference - High quality silicon-nitride thin films grown by helium plasma-enhanced chemical vapor deposition
Lim, S., Kim, S.J., Jung, J.H., Ju, B.K., Oh, M.H., Wager, J.F.Year:
1996
Language:
english
DOI:
10.1109/ivmc.1996.601852
File:
PDF, 270 KB
english, 1996