A Low-Cost Hands-On Laboratory to Introduce Lithography...

IEEE Transactions on Education 2012 / 11 Vol. 55; Iss. 4

A Low-Cost Hands-On Laboratory to Introduce Lithography Concepts

Jalali, Maryam, Marti, James J., Kirchhoff, Allison L., Lawrenz, Frances, Campbell, Stephen A.
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Volume:
55
Language:
english
Journal:
IEEE Transactions on Education
DOI:
10.1109/te.2012.2192442
Date:
November, 2012
File:
PDF, 630 KB
english, 2012
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