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[IEEE 2009 IEEE International Memory Workshop (IMW) - Monterey, CA, USA (2009.05.10-2009.05.14)] 2009 IEEE International Memory Workshop - Improvement of 48 nm TANOS NAND Cell Performance by Introduction of a Removable Encapsulation Liner
Beug, M. F., Melde, T., Paul, J., Bewersdorff-Sarlette, U., Czernohorsky, M., Beyer, V., Hoffmann, R., Seidel, K., Lohr, D. A., Bach, L., Knoefler, R., Tilke, A. T.Year:
2009
Language:
english
DOI:
10.1109/imw.2009.5090595
File:
PDF, 450 KB
english, 2009