[IEEE 2006 International Symposium on Discharges and Electrical Insulation in Vacuum - Matsue, Japan (2006.09.25-2006.09.29)] 2006 International Symposium on Discharges and Electrical Insulation in Vacuum - Optimization of a gas jet-type Z-pinch discharge EUV light source
Iizuka, Naoya, Kishi, Nozomu, Song, Inho, Sakamoto, Toshiro, Kobayashi, Yasunori, R.Mohanty, Smruti, Watanabe, Masahito, Okino, Akitoshi, Hotta, EikiYear:
2006
Language:
english
DOI:
10.1109/deiv.2006.357381
File:
PDF, 3.40 MB
english, 2006