[IEEE Proceedings of the 11th International Symposium on the Physical and Failure Analysis of Integrated Circuits. IPFA 2004 - Taiwan (5-8 July 2004)] Proceedings of the 11th International Symposium on the Physical and Failure Analysis of Integrated Circuits. IPFA 2004 (IEEE Cat. No.04TH8743) - Ultra-thin SiON and high-k HfO/sub 2/ gate dielectric metrology using transmission electron microscopy
Du, A.Y., Tung, C.H., Freitag, B.H., Zhang, W.Y., Lim, S., Ang, E.H., Ng, D.Year:
2004
Language:
english
DOI:
10.1109/ipfa.2004.1345569
File:
PDF, 274 KB
english, 2004