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The 18 mm$^{2}$ Laboratory: Teaching MEMS Development With the SUMMiT Foundry Process
Dallas, Tim, Berg, Jordan M., Gale, Richard O.Volume:
55
Language:
english
Journal:
IEEE Transactions on Education
DOI:
10.1109/te.2012.2195182
Date:
November, 2012
File:
PDF, 998 KB
english, 2012