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[IEEE IEEE The Tenth Annual International Workshop on Micro Electro Mechanical Systems. An Investigation of Micro Structures, Sensors, Actuators, Machines and Robots - Nagoya, Japan (26-30 Jan. 1997)] Proceedings IEEE The Tenth Annual International Workshop on Micro Electro Mechanical Systems. An Investigation of Micro Structures, Sensors, Actuators, Machines and Robots - Self-supported Si fabrication of with STM nano-structure
Hamanaka, H., On, T., Esashi, E.Year:
1997
Language:
english
DOI:
10.1109/memsys.1997.581791
File:
PDF, 904 KB
english, 1997