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[IEEE International Electron Devices Meeting. Technical Digest - Washington, DC, USA (2-5 Dec. 2001)] International Electron Devices Meeting. Technical Digest (Cat. No.01CH37224) - High performance single work-function tungsten gate CMOS devices for gigabit DRAM
Woo-tag Kang,, Gluschenkov, O., Boyong He,, Yujun Li,, Malik, R., Clevenger, L., McStay, I., Robl, W., Vollertsen, R., Masse, G., La Rosa, G., Lee, K., Murthy, C., Parks, C., Mohler, R., Bergner, WYear:
2001
Language:
english
DOI:
10.1109/iedm.2001.979402
File:
PDF, 340 KB
english, 2001