[IEEE 2013 24th Annual SEMI Advanced Semiconductor Manufacturing Conference (ASMC 2013) - Saratoga Springs, NY (2013.5.14-2013.5.16)] ASMC 2013 SEMI Advanced Semiconductor Manufacturing Conference - Metrology and inspection challenges for manufacturing 3D stacked IC's
Halder, Sandip, Stiers, Karen, Miller, Andy, de Wolf, Ingrid, Phommahaxay, Alain, Maenhoudt, Mireille, Beyne, Eric, Guerrieri, StefanoYear:
2013
Language:
english
DOI:
10.1109/asmc.2013.6552779
File:
PDF, 877 KB
english, 2013