[IEEE IEEE The Tenth Annual International Workshop on Micro Electro Mechanical Systems. An Investigation of Micro Structures, Sensors, Actuators, Machines and Robots - Nagoya, Japan (26-30 Jan. 1997)] Proceedings IEEE The Tenth Annual International Workshop on Micro Electro Mechanical Systems. An Investigation of Micro Structures, Sensors, Actuators, Machines and Robots - A high-T/sub c/ superconductor bolometer on a silicon nitride membrane
Sanchez, S., Elwenspoek, M., Gui, C., De Nivelle, M.J.M.E., De Vries, R., De Korte, P.A.J., Bruijn, M.P., Wijnbergen, J.J., Michalke, W., Steinbeiss, E., Heidenblut, T., Schwierzi, B.Year:
1997
Language:
english
DOI:
10.1109/memsys.1997.581912
File:
PDF, 842 KB
english, 1997