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[IEEE 2006 64th Device Research Conference - State College, PA, USA (2006.06.26-2006.06.28)] 2006 64th Device Research Conference - High-Performance Nanomechanical Oscillators Fabricated by Bottom-up Integration of Silicon Nanowires
Li, Mingwei, Bhiladvala, Rustom, Sioss, James, Lew, Kok-keong, Redwing, Joan, Keating, Christine, Mayer, TheresaYear:
2006
Language:
english
DOI:
10.1109/drc.2006.305049
File:
PDF, 2.13 MB
english, 2006