[IEEE 2005 International Conference on MEMS,NANO and Smart Systems - Banff, AB, Canada (24-27 July 2005)] 2005 International Conference on MEMS,NANO and Smart Systems - CYCLO-OLEFIN POLYMER DIRECT BONDING USING LOW TEMPERATURE PLASMA ACTIVATION BONDING
Jun Mizuno,, Farrens, S., Dragoi, V., Glinsner, T., Ishida, H., Shinohara, H., Suzuki, T., Ishizuka, M., Shoji, S.Year:
2005
Language:
english
DOI:
10.1109/icmens.2005.37
File:
PDF, 323 KB
english, 2005