Enhancing the Linear Range of MEMS Resonators for Sensing...

IEEE Sensors Journal 2011 / 12 Vol. 11; Iss. 12

Enhancing the Linear Range of MEMS Resonators for Sensing Applications

Tocchio, Alessandro, Comi, Claudia, Langfelder, Giacomo, Corigliano, Alberto, Longoni, Antonio
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Volume:
11
Language:
english
Journal:
IEEE Sensors Journal
DOI:
10.1109/jsen.2011.2158997
Date:
December, 2011
File:
PDF, 1.27 MB
english, 2011
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