[IEEE 2013 IEEE 10th International Conference on ASIC (ASICON 2013) - Shenzhen, China (2013.10.28-2013.10.31)] 2013 IEEE 10th International Conference on ASIC - PEALD Ru/RuOx films for ULSI applications and its transition control between metal and metal oxide
Chun-Min Zhang,, Qing-Qing Sun,, Peng-Fei Wang,, David Wei Zhang,Year:
2013
Language:
english
DOI:
10.1109/asicon.2013.6811922
File:
PDF, 839 KB
english, 2013