Deposition of osmium thin films using pyrazolate complexes as CVD source reagents
Chi, Yun, Yu, Huan-Li, Ching, Wei-Li, Liu, Chao-Shiuan, Chen, Yao-Lun, Chou, Tsung-Yi, Peng, Shie-Ming, Lee, Gene-HsiangVolume:
12
Language:
english
Journal:
Journal of Materials Chemistry
DOI:
10.1039/b109150f
Date:
April, 2002
File:
PDF, 430 KB
english, 2002