Sensitized excited free-radical processes as read–write tools: impact on non-linear lithographic processes
Impellizzeri, Stefania, Stamplecoskie, Kevin G., Scaiano, Juan. C.Volume:
15
Year:
2013
Language:
english
Journal:
Physical Chemistry Chemical Physics
DOI:
10.1039/c3cp51723c
File:
PDF, 1.88 MB
english, 2013