Bis(cyclopentadienyl) zirconium(IV) amides as possible...

Inorganica Chimica Acta 2010 Vol. 363; Iss. 6

Bis(cyclopentadienyl) zirconium(IV) amides as possible precursors for low pressure CVD and plasma-enhanced ALD

Stephen E. Potts, Claire J. Carmalt, Christopher S. Blackman, Fawzi Abou-Chahine, Noémi Leick, W.M.M. Kessels, Hywel O. Davies, Peter N. Heys
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Volume:
363
Year:
2010
Language:
english
Pages:
7
DOI:
10.1016/j.ica.2009.07.004
File:
PDF, 519 KB
english, 2010
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