Design, Fabrication, and Testing of a Microfabricated...

Design, Fabrication, and Testing of a Microfabricated Corona Ionizer

Beelee Chua,, Wexler, A.S., Tien, N.C., Niemeier, D.A., Holmen, B.A.
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Volume:
17
Language:
english
Journal:
Journal of Microelectromechanical Systems
DOI:
10.1109/jmems.2007.909515
Date:
February, 2008
File:
PDF, 837 KB
english, 2008
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