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[IEEE International Conference on Advanced Semiconductor Devices and Microsystems (ASDAM) - Smolenice, Slovakia (16-18 Oct. 2000)] ASDAM 2000. Conference Proceedings. Third International EuroConference on Advanced Semiconductor Devices and Microsystems (Cat. No.00EX386) - Effect of rapid thermal annealing on the properties of ZrB/sub x/(TiB/sub x/)-Si contacts
Boltovets, N.S., Ivanov, V.N., Konakova, R.V., Milenin, V.V., Voitsikhovsky, D.I.Year:
2000
Language:
english
DOI:
10.1109/asdam.2000.889540
File:
PDF, 266 KB
english, 2000