[IEEE 2011 IEEE International Conference on Nano/Micro Engineered and Molecular Systems (NEMS) - Kaohsiung, Taiwan (2011.02.20-2011.02.23)] 2011 6th IEEE International Conference on Nano/Micro Engineered and Molecular Systems - Fabrication and characterization of 100-nm wide silicon nanocantilevers using top-down approach
Guillon, Samuel, Saya, Daisuke, Mazenq, Laurent, Nicu, Liviu, Perisanu, Sorin, Vincent, PascalYear:
2011
Language:
english
DOI:
10.1109/nems.2011.6017343
File:
PDF, 407 KB
english, 2011