[IEEE 5th Electronics Packaging Technology Conference (EPTC...

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[IEEE 5th Electronics Packaging Technology Conference (EPTC 2003) - Singapore (10-12 Dec. 2003)] Proceedings of the 5th Electronics Packaging Technology Conference (EPTC 2003) - Removal of post-dry etch polymer residue from BEOL structures using an ozonated-DI-water technology

Yoke Yee Lee,, Ann, H.S., Detterbeck, S.
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Year:
2003
Language:
english
DOI:
10.1109/eptc.2003.1271603
File:
PDF, 238 KB
english, 2003
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