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[IEEE ESSDERC 2003. 33rd European Solid-State Device Research - ESSDERC '03 - Estoril, Portugal (16-18 Sept. 2003)] Electrical Performance of Electrical Packaging (IEEE Cat. No. 03TH8710) - Towards a better EOT - mobility trade-off in high-k oxide/metal gate CMOS devices
Muller, M., Duguay, S., Guillaumot, B., Garros, X., Leroux, C., Tavel, B., Martin, F., Rivoire, M., Delille, D., Boeuf, F., Deleonibus, S., Skotnicki, T.Year:
2003
Language:
english
DOI:
10.1109/essderc.2003.1256890
File:
PDF, 312 KB
english, 2003