[IEEE 2011 IEEE International SOI Conference - Tempe, AZ, USA (2011.10.3-2011.10.6)] IEEE 2011 International SOI Conference - Implant approaches and challenges for 20nm node and beyond ETSOI devices
Ponoth, S., Vinet, M., Grenouillet, L., Kumar, A., Kulkarni, P., Liu, Q., Cheng, K., Haran, B., Posseme, N., Khakifirooz, A., Loubet, N., Mehta, S., Kuss, J., Destefanis, V., Berliner, N., SreenivasanYear:
2011
Language:
english
DOI:
10.1109/soi.2011.6081679
File:
PDF, 538 KB
english, 2011