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CMOS micromachined cantilever-in-cantilever devices with magnetic actuation
Shen, B., Allegretto, W., Hu, M., Robinson, A.M.Volume:
17
Language:
english
Journal:
IEEE Electron Device Letters
DOI:
10.1109/55.506371
Date:
July, 1996
File:
PDF, 409 KB
english, 1996