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Atomic layer deposition of Er2O3 thin films from Er tris-guanidinate and water: process optimization, film analysis and electrical properties
Xu, Ke, Chaudhuri, Ayan Roy, Parala, Harish, Schwendt, Dominik, Arcos, Teresa de los, Osten, H. Jörg, Devi, AnjanaVolume:
1
Year:
2013
Language:
english
Journal:
Journal of Materials Chemistry C
DOI:
10.1039/c3tc30401a
File:
PDF, 852 KB
english, 2013