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[IEEE 1994 VLSI Technology Symposium - Honolulu, HI, USA (7-9 June 1994)] Proceedings of 1994 VLSI Technology Symposium - A new titanium salicide process (DIET) for sub-quarter micron CMOS
Horiuchi, T., Wakabayashi, H., Iskigami, T., Nakamura, H., Mogami, T., Kunio, T., Okumura, K.Year:
1994
Language:
english
DOI:
10.1109/vlsit.1994.324427
File:
PDF, 185 KB
english, 1994