Thermal decomposition of V(NEt2)4 in an MOCVD reactor: a...

Journal of Materials Chemistry 1996 Vol. 6; Iss. 9

Thermal decomposition of V(NEt2)4 in an MOCVD reactor: a low-temperature route to vanadium carbonitride coatings

Bonnefond, Pierre, Feurer, Roselyne, Reynes, Alex, Maury, Francis, Chanson, Benoit, Choukroun, Robert, Cassoux, Patrick
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Volume:
6
Year:
1996
Language:
english
Journal:
Journal of Materials Chemistry
DOI:
10.1039/jm9960601501
File:
PDF, 791 KB
english, 1996
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