[IEEE 2000 IEEE/LEOS International Conference on Optical MEMS - Kauai, HI, USA (21-24 Aug. 2000)] 2000 IEEE/LEOS International Conference on Optical MEMS (Cat. No.00EX399) - Design, fabrication and packaging of micro-optical components and systems
Kopola, H., Hiltunen, J., Hakkila, J., Karioja, P., Kololnoma, T., Karkkainen, A., Paaso, J., Rantala, J.T.Year:
2000
Language:
english
DOI:
10.1109/omems.2000.879648
File:
PDF, 192 KB
english, 2000