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[IEEE 2012 5th International Conference on Emerging Trends in Engineering and Technology (ICETET) - Himeji, Japan (2012.11.5-2012.11.7)] 2012 Fifth International Conference on Emerging Trends in Engineering and Technology - Sputtering Deposition of Lead-free Piezoelectric (K, Na)NbO3 Thin Films
Ratanapreechachai, P., Kanno, I., Sato, M.Year:
2012
Language:
english
DOI:
10.1109/icetet.2012.15
File:
PDF, 432 KB
english, 2012