A study of the mechanisms for ESD damage to reticles

IEEE Transactions on Electronics Packaging Manufacturing 2001 / 04 Vol. 24; Iss. 2

A study of the mechanisms for ESD damage to reticles

Montoya, J., Levit, L., Englisch, A.
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Volume:
24
Language:
english
Journal:
IEEE Transactions on Electronics Packaging Manufacturing
DOI:
10.1109/6104.930957
Date:
April, 2001
File:
PDF, 167 KB
english, 2001
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