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[IEEE 2009 4th IEEE International Conference on Nano/Micro Engineered and Molecular Systems - Shenzhen, China (2009.01.5-2009.01.8)] 2009 4th IEEE International Conference on Nano/Micro Engineered and Molecular Systems - Analyzing the frequency response of micromachined capacitive inertial devices by the third harmonic detection
Xiao, Dingbang, Xie, Liqiang, Hou, Zhanqiang, Wu, Xuezhong, Li, ShengyiYear:
2009
Language:
english
DOI:
10.1109/nems.2009.5068591
File:
PDF, 5.95 MB
english, 2009