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[IEEE 2007 IEEE International Conference on Control Applications - Singapore (2007.10.1-2007.10.3)] 2007 IEEE International Conference on Control Applications - Real-time estimation and control of photoresist properties in microlithography
Wu, Xiaodong, Tay, Arthur, Ho, Weng Khuen, Tan, Kok KiongYear:
2007
Language:
english
DOI:
10.1109/cca.2007.4389313
File:
PDF, 807 KB
english, 2007