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[Japan Soc. Appl. Phys Extended Abstracts of International Workshop on Gate Insulator. IWGI 2001 - Tokyo, Japan (1-2 Nov. 2001)] Extended Abstracts of International Workshop on Gate Insulator. IWGI 2001 (IEEE Cat. No.01EX537) - Electrical characterisation of high-k materials prepared by atomic layer CVD
Carter, R.J., Cartier, E., Caymax, M., De Gendt, S., Degraevel R,, Groeseneken, G., Heyns, M., Kauerauf, T., Kerber, A., Kubicek, S., Lujan, G., Pantisano, L., Tsai, W., Young, E.Year:
2001
Language:
english
DOI:
10.1109/iwgi.2001.967554
File:
PDF, 512 KB
english, 2001