Fabrication and Characterization of MEMS-Based Resonant...

IEEE Sensors Journal 2012 / 06 Vol. 12; Iss. 6

Fabrication and Characterization of MEMS-Based Resonant Organic Gas Sensors

Hajjam, Arash, Pourkamali, Siavash
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Volume:
12
Language:
english
Journal:
IEEE Sensors Journal
DOI:
10.1109/jsen.2011.2181360
Date:
June, 2012
File:
PDF, 926 KB
english, 2012
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