[IEEE 1996 Conference on Optoelectronic and Microelectronic...

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[IEEE 1996 Conference on Optoelectronic and Microelectronic Materials and Devices. Proceedings - Canberra, ACT, Australia (8-11 Dec. 1996)] 1996 Conference on Optoelectronic and Microelectronic Materials and Devices. Proceedings - The optical and electrical characteristics of a-Si:H films prepared by ECR CVD

Moonsang Kang,, Jaeyeong Kim,, Chul An,, Taehoon Lim,, Inhwan Oh,, Bupju Jeon,, Ilhyun Jung,, Yongseo Koo,
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Year:
1996
Language:
english
DOI:
10.1109/commad.1996.610171
File:
PDF, 287 KB
english, 1996
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