[IEEE 2011 Materials for Advanced Metallization (MAM) - Dresden, Germany (2011.05.8-2011.05.12)] 2011 IEEE International Interconnect Technology Conference - Si ohmic contacts on N-type SiC
Cichon, Stanislav, Machac, Petr, Barda, Bohumil, Kudrnova, MarieYear:
2011
Language:
english
DOI:
10.1109/iitc.2011.5940323
File:
PDF, 160 KB
english, 2011