Cantilever Resonator With Integrated Actuation and Sensing...

IEEE Sensors Journal 2013 / 02 Vol. 13; Iss. 2

Cantilever Resonator With Integrated Actuation and Sensing Fabricated Using a Single Step Lithography

Mohanasundaram, S. M., Pratap, Rudra, Ghosh, Arindam
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Volume:
13
Language:
english
Journal:
IEEE Sensors Journal
DOI:
10.1109/jsen.2012.2225045
Date:
February, 2013
File:
PDF, 509 KB
english, 2013
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