Process-dependent thin-film thermal conductivities for...

Process-dependent thin-film thermal conductivities for thermal CMOS MEMS

von Arx, M., Paul, O., Baltes, H.
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Volume:
9
Language:
english
Journal:
Journal of Microelectromechanical Systems
DOI:
10.1109/84.825788
Date:
March, 2000
File:
PDF, 355 KB
english, 2000
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