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[IEEE The 17th Annual SEMI/IEEE ASMC 2006 Conference - Boston, MA (May 22-24, 2006)] The 17th Annual SEMI/IEEE ASMC 2006 Conference - First Look at Across-chip Performance Variation Using Non-Contact, Performance-Based Metrology
Babazadeh, M., Johnson, G., Vickers, J., Estabil, J., Pakdaman, N., Steinbrueck, G., Borot, B., Doedel, W., Galvier, J.Year:
2006
Language:
english
DOI:
10.1109/asmc.2006.1638768
File:
PDF, 452 KB
english, 2006