[IEEE Technical Digest of the 18th International Vacuum...

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[IEEE Technical Digest of the 18th International Vacuum Nanoelectronics Conference - Oxford, UK (10-14 July 2005)] 2005 International Vacuum Nanoelectronics Conference - Study on SBD by SEM with penetrating surface method compared to EBIC method

Wenguo Hu,, Yiping Lin,, Zhuguan Liang,, Ling Xiao,, Kailin Zhou,, Yawen Li,, Ping Li,, Xinghua Hu,, Jian Wang,, Rau, E.I.
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Year:
2005
Language:
english
DOI:
10.1109/ivnc.2005.1619526
File:
PDF, 663 KB
english, 2005
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