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[IEEE 2007 2nd IEEE International Conference on Nano/Micro Engineered and Molecular Systems - Bangkok, Thailand (2007.01.16-2007.01.19)] 2007 2nd IEEE International Conference on Nano/Micro Engineered and Molecular Systems - Nanopatterning with Extreme Ultraviolet Interference Lithography for Nanoelectronics and Biotechnology
Stadler, Brigitte, Solak, Harun, Frerker, Susanne, Grandin, Michelle, Voros, JanosYear:
2007
Language:
english
DOI:
10.1109/nems.2007.352046
File:
PDF, 579 KB
english, 2007