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[IEEE Conference Digest [Late News Papers volume included]Device Research Conference, 2004. 62nd DRC. - Notre Dame, IN, USA (June 21-23, 2004)] Conference Digest [Late News Papers volume included]Device Research Conference, 2004. 62nd DRC. - Impact of reducing RTA temperature on sub-10nm ultra-thin body SOI
Jong-Heon Yang,, Jihun Oh,, Won-ju Cho,, Chang-Geun Ahn,, Kiju Im,, In-Bok Baek,, Jonghyurk Park,, Seongjae Lee,Year:
2004
Language:
english
DOI:
10.1109/drc.2004.1367765
File:
PDF, 145 KB
english, 2004