![](/img/cover-not-exists.png)
Integrated measurement-modeling approaches for evaluating residual stress using micromachined fixed-fixed beams
Baker, M.S., de Boer, M.P., Smith, N.F., Warne, L.K., Sinclair, M.B.Volume:
11
Language:
english
Journal:
Journal of Microelectromechanical Systems
DOI:
10.1109/jmems.2002.805210
Date:
December, 2002
File:
PDF, 969 KB
english, 2002