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[IEEE IEEE/SEMI Conference on Advanced Semiconductor Manufacturing Workshop - Danvers, MA, USA (11-12 Sept. 1990)] IEEE/SEMI Conference on Advanced Semiconductor Manufacturing Workshop - Polyimide stress buffers in IC technology
Schuckert, C., Murray, D., Roberts, C., Cheek, G., Goida, T.Year:
1990
Language:
english
DOI:
10.1109/asmc.1990.111222
File:
PDF, 300 KB
english, 1990