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[IEEE 2012 International Conference on Emerging Electronics (ICEE 2012) - Mumbai, India (2012.12.15-2012.12.17)] 2012 International Conference on Emerging Electronics - Optimization of oxygen flow rate for e-beam evaporated HfO2 thin films
Ganapathi, K.L., Bhat, Navakanta, Mohan, S.Year:
2012
Language:
english
DOI:
10.1109/icemelec.2012.6636257
File:
PDF, 608 KB
english, 2012