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Preliminary study of a novel scanning charge-pumping method using extra gates for SOI wafer inspection
Yoshida, H., Takami, T., Uchihashi, T., Kishino, S., Naruoka, H., Mashiko, Y.Volume:
23
Language:
english
Journal:
IEEE Electron Device Letters
DOI:
10.1109/led.2002.803750
Date:
October, 2002
File:
PDF, 220 KB
english, 2002