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[IEEE 2013 International Conference on Optoelectronics and Microelectronics (ICOM) - Harbin, China (2013.09.7-2013.09.9)] 2013 International Conference on Optoelectronics and Microelectronics (ICOM) - A study on MEMS acoustic vibration sensor technology
Yonghe Qin,, Yingjie Qiao,, Wenjiang Zou,, Xingyue Xu,Year:
2013
Language:
english
DOI:
10.1109/icoom.2013.6626490
File:
PDF, 1.44 MB
english, 2013