Mechanism of chemical vapour deposition of silicon alkoxide...

Journal of the Chemical Society Faraday Transactions 1 1988 Vol. 84; Iss. 12

Mechanism of chemical vapour deposition of silicon alkoxide on mordenites

Niwa, Miki, Kawashima, Yoshimi, Hibino, Takashi, Murakami, Yuichi
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Volume:
84
Year:
1988
Language:
english
Journal:
Journal of the Chemical Society, Faraday Transactions 1: Physical Chemistry in Condensed Phases
DOI:
10.1039/f19888404327
File:
PDF, 666 KB
english, 1988
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