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[IEEE 2007 IEEE International Reliability Physics Symposium Proceedings. 45th Annual - Phoenix, AZ, USA (2007.04.15-2007.04.19)] 2007 IEEE International Reliability Physics Symposium Proceedings. 45th Annual - Leakage Current Characteristic of Pre-Damaged Interlayer Dielectric During Voltage Ramp Method
Hwang, Sang-Soo, Jung, Sung-Yup, Joo, Young-ChangYear:
2007
Language:
english
DOI:
10.1109/relphy.2007.369984
File:
PDF, 2.46 MB
english, 2007